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Highly dispersive multiplexed micromechanical device array for spatially resolved sensing and actuation

Leonardo Gregorat
•
Marco Cautero
•
Leonardo Vicarelli
altro
Alessandro Pitanti
2024
  • journal article

Periodico
MICROSYSTEMS & NANOENGINEERING
Abstract
The powerful resource of parallelizing simple devices for realizing and enhancing complex operations comes with the drawback of multiple connections for addressing and controlling the individual elements. Here we report on a technological platform where several mechanical resonators can be individually probed and electrically actuated by using dispersive multiplexing within a single electrical channel. We demonstrate room temperature control of the individual device vibrational motion and spatially-resolved readouts. As the single elements have proven to be excellent bolometers and individual nodes for reservoir computing, our platform can be directly employed for single-channel addressing of multiple devices, with immediate applications for far-infrared cameras, spatial light modulators and recurrent neural networks operating at room temperature.
DOI
10.1038/s41378-024-00816-z
WOS
WOS:001363389800001
Archivio
https://hdl.handle.net/11368/3091758
info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-85210245500
https://www.nature.com/articles/s41378-024-00816-z
Diritti
open access
license:creative commons
license uri:http://creativecommons.org/licenses/by/4.0/
FVG url
https://arts.units.it/bitstream/11368/3091758/2/Gregorat_et_al-2024-Microsystems_&_Nanoengineering.pdf
Soggetti
  • Terahertz

  • MEMS

  • bolometer

  • frequency multiplexin...

  • imaging

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