Investigation of a Self-Aligned Cobalt Silicide Process for Ohmic Contacts to Silicon Carbide

Ekström, Mattias

•

FERRARIO, Andrea

•

Zetterling, Carl-Mikael

2019

journal article

Periodico

JOURNAL OF ELECTRONIC MATERIALS

DOI

10.1007/s11664-019-07020-0

WOS

WOS:000460453100095

Archivio

http://hdl.handle.net/11390/1145251

info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-85061514454

Diritti

metadata only access

Scopus© citazioni

1

Data di acquisizione
Jun 14, 2022

Web of Science© citazioni

2

Data di acquisizione
Mar 19, 2024