Experimental characterization of electrostatically actuated in-plane bending of microcantilevers

BALLESTRA A

•

BRUSA E

•

SOMA A.

•

MUNTEANU, Mircea Gheorghe

2008

journal article

Periodico

MICROSYSTEM TECHNOLOGIES

Archivio

http://hdl.handle.net/11390/689975

info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-44249112330

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metadata only access

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1

Data di acquisizione
Jun 8, 2022