A detailed experimental study of the spectral distribution of hot-electron-induced photon emission in n-channel MOSFETs is presented. The study significantly improves on previous work by considering energies up to 3.1 eV and different operating temperatures. It is shown that in contrast with previous results, the photon energy distribution is markedly non-Maxwellian, thus suggesting that the same is true for the energy distribution of the channel electrons.
