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High-resolution scanning X-ray diffraction microscopy

Pierre Thibault
•
Martin Dierolf
•
Andreas Menzel
altro
Franz Pfeiffer
2008
  • journal article

Periodico
SCIENCE
Abstract
Coherent diffractive imaging (CDI) and scanning transmission x-ray microscopy (STXM) are two popular microscopy techniques that have evolved quite independently. CDI promises to reach resolutions below 10 nanometers, but the reconstruction procedures put stringent requirements on data quality and sample preparation. In contrast, STXM features straightforward data analysis, but its resolution is limited by the spot size on the specimen. We demonstrate a ptychographic imaging method that bridges the gap between CDI and STXM by measuring complete diffraction patterns at each point of a STXM scan. The high penetration power of x-rays in combination with the high spatial resolution will allow investigation of a wide range of complex mesoscopic life and material science specimens, such as embedded semiconductor devices or cellular networks.
DOI
10.1126/science.1158573
WOS
WOS:000257713900042
Archivio
http://hdl.handle.net/11368/2977447
info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-47749095385
Diritti
metadata only access
Soggetti
  • imaging method

  • microscopy

  • scanning electron mic...

  • X-ray diffraction

Web of Science© citazioni
984
Data di acquisizione
Mar 26, 2024
Visualizzazioni
1
Data di acquisizione
Apr 19, 2024
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