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Models for the use of commercial TCAD in the analysis of silicon-based integrated biosensors

PITTINO, Federico
•
PALESTRI, Pierpaolo
•
SCARBOLO, Paolo
altro
SELMI, Luca
2014
  • journal article

Periodico
SOLID-STATE ELECTRONICS
Abstract
We present a simple approach to describe electrolytes in TCAD simulators for the modeling of nano-biosensors. The method exploits the similarity between the transport equations for electrons and holes in semiconductors and the ones for charged ions in a solution. We describe a few workarounds to improve the model accuracy in spite of the limitations of commercial TCAD. Applications to the simulations of silicon nanowire and nanoelectrode biosensors are reported as relevant examples.
DOI
10.1016/j.sse.2014.04.011
WOS
WOS:000339149000012
Archivio
http://hdl.handle.net/11390/871765
info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-84902292561
Diritti
closed access
Soggetti
  • Biosensor

  • TCAD

  • Modeling

  • Nanowire

  • Nano-electrode

  • Steric effects

Web of Science© citazioni
49
Data di acquisizione
Mar 26, 2024
Visualizzazioni
3
Data di acquisizione
Apr 19, 2024
Vedi dettagli
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