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Piezoresistive Properties of Suspended Graphene Membranes under Uniaxial and Biaxial Strain in Nanoelectromechanical Pressure Sensors

Smith, Anderson D.
•
Niklaus, Frank
•
Paussa, Alan
altro
Lemme, Max C.
2016
  • journal article

Periodico
ACS NANO
Abstract
Monolayer graphene exhibits exceptional electronic and mechanical properties, making it a very promising material for nanoelectromechanical devices. Here, we conclusively demonstrate the piezoresistive effect in graphene in a nanoelectromechanical membrane configuration that provides direct electrical readout of pressure to strain transduction. This makes it highly relevant for an important class of nanoelectromechanical system (NEMS) transducers. This demonstration is consistent with our simulations and previously reported gauge factors and simulation values. The membrane in our experiment acts as a strain gauge independent of crystallographic orientation and allows for aggressive size scalability. When compared with conventional pressure sensors, the sensors have orders of magnitude higher sensitivity per unit area.
DOI
10.1021/acsnano.6b02533
WOS
WOS:000388913100016
Archivio
http://hdl.handle.net/11390/1100269
info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-84997235109
http://pubs.acs.org/journal/ancac3
Diritti
open access
Soggetti
  • (suspended) graphene ...

  • gauge factor

  • graphene

  • MEMS

  • nanoelectromechanical...

  • NEMS

  • piezoresistive transd...

  • pressure transducer

  • strain gauge

  • transducer

  • uniaxial and biaxial ...

  • Materials Science (al...

  • Engineering (all)

  • Physics and Astronomy...

Web of Science© citazioni
103
Data di acquisizione
Mar 26, 2024
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